Optimal design and fabrication of MEMS rotary thermal actuators
- 9 October 2007
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 17 (11), 2241-2247
- https://doi.org/10.1088/0960-1317/17/11/010
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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