Micromachined 1 × 2 optical-fiber switch
- 31 May 1996
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 53 (1-3), 311-315
- https://doi.org/10.1016/0924-4247(96)80154-3
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Metallic microstructures fabricated using photosensitive polyimide electroplating moldsJournal of Microelectromechanical Systems, 1993