Bent-beam electrothermal actuators-Part I: Single beam and cascaded devices
- 1 June 2001
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 10 (2), 247-254
- https://doi.org/10.1109/84.925771
Abstract
No abstract availableThis publication has 25 references indexed in Scilit:
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