Thermally actuated optical microscanner with large angle and low consumption
- 1 August 1999
- journal article
- conference paper
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 76 (1-3), 470-477
- https://doi.org/10.1016/s0924-4247(99)00012-6
Abstract
A monolithic silicon integrated optical micro-scanner is presented. The device consists of a mirror located on the tip of a thermal bimorph actuator beam. The fabrication process is very simple and compatible with IC fabrication techniques. The device is excited electrothermally at its resonance frequency, enabling large angular deflections at low power consumption. The technological process consists of basic frontside silicon micromachining steps requiring only three mask levels. The moving part is defined by selective silicon bulk etching. The bimorph beam is made of silicon dioxide and a thin film conductor. The residual stress in the two layers is used to achieve a 45 degrees out-of-plane rest position of the mirror. This allows optical components (e.g., laser diode, collimating lens) to be placed directly on the silicon substrate. Mirrors of 500 x 300 to 800 x 800 mu m(2) with resonant frequencies varying from 600 to 100 Hz were realized. Mechanical scan angles of above 90 degrees were achieved. The devices are very robust and have run through fatigue tests of billions of cycles at 300 Hz and 90 degrees deflection. The power consumption of the device is typically 1 mW for 30 degrees mirror deflection. (C) 1999 Elsevier Science S.A. All rights reserved.Keywords
This publication has 14 references indexed in Scilit:
- MOEM scan engine for bar code reading and factory automationPublished by SPIE-Intl Soc Optical Eng ,1998
- Development of micro-electro-mechanical optical scannerOptical Engineering, 1997
- Micromachined electromagnetic scanning mirrorsOptical Engineering, 1997
- Linear array of complementary metal oxide semiconductor double-pass metal micromirrorsOptical Engineering, 1997
- Organic thermal and electrostatic ciliary microactuator array for object manipulationSensors and Actuators A: Physical, 1997
- Electrostatically deflectable polysilicon torsional mirrorsSensors and Actuators A: Physical, 1994
- High-performance microphotonic devices with microactuatorPublished by SPIE-Intl Soc Optical Eng ,1993
- Analysis of tip deflection and force of a bimetallic cantilever microactuatorJournal of Micromechanics and Microengineering, 1993
- Biaxial scanning mirror activated by bimorph structures for medical applicationsSensors and Actuators A: Physical, 1992
- Thermally excited silicon microactuatorsIEEE Transactions on Electron Devices, 1988