Structural transition and recovery of Ge implanted β -Ga2O3
- 12 October 2020
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 117 (15), 152101
- https://doi.org/10.1063/5.0022170
Abstract
Ion implantation-induced effects were studied in Ge implanted β-Ga2O3 with the fluence and energy of 3 × 1013 cm−2/60 keV, 5 × 1013 cm−2/100 keV, and 7 × 1013 cm−2/200 keV using analytical electron microscopy via scanning/transmission electron microscopy, electron energy loss spectroscopy, and precession electron diffraction via TopSpin. Imaging shows an isolated band of damage after Ge implantation, which extends ∼130 nm from the sample surface and corresponds to the projected range of the ions. Electron diffraction demonstrates that the entirety of the damage band is the κ phase, indicating an implantation-induced phase transition from β to κ-Ga2O3. Post-implantation annealing at 1150 °C for 60 s under the O2 atmosphere led to a back transformation of κ to β; however, an ∼17 nm damage zone remained at the sample surface. Despite the back transformation from κ to β with annealing, O K-edge spectra show changes in the fine structure between the pristine, implanted, and implanted-annealed samples, and topspin strain analysis shows a change in strain between the two samples. These data indicate differences in the electronic/chemical structure, where the change of the oxygen environment extended beyond the implantation zone (∼130 nm) due to the diffusion of Ge into the bulk material, which, in turn, causes a tensile strain of 0.5%. This work provides a foundation for understanding of the effects of ion implantation on defect/phase evolution in β-Ga2O3 and the related recovery mechanism, opening a window toward building a reliable device for targeted applications.Funding Information
- National Science Foundation Program (#1429661.)
- the Department of the Defense, Defense Threat Reduction Agency (HDTRA1-17-1-011)
- U.S. Department of Energy (DE-SC0020314)
- Office of Naval Research Global (N00014-15-1-2392.)
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