Abstract
Thermal properties of semiconductor superlattices have been investigated for the first time. The thermal properties of AlAs/GaAs superlattices were measured with the ac calorimetric method. It is found that the thermal diffusivity and thermal conductivity of the AlAs/GaAs superlattices are larger than those of the AlGaAs alloy due to the suppression of alloy scattering in the superlattice. However, the thermal diffusivity and thermal conductivity decrease with a decrease in the superlattice period and seem to approach those of the Al0.5Ga0.5As alloy in the limit of short‐period superlattices.