A study of the plasma electronegativity in an argon–oxygen pulsed-dc sputter magnetron

Abstract

Using Langmuir probe-assisted laser photodetachment, the temporal evolution of the O⁻ density was determined in the bulk plasma of a unipolar pulsed-dc magnetron. The source was operated in reactive mode, at a fixed nominal on-time power of 100 W, sputtering Ti in argon–oxygen atmospheres at 1.3 Pa pressure, but over a variation of duty cycles from 5% to 50% and oxygen partial pressures of 10% and 50% of the total pressure. In the plasma on-time, for all duty cycles the negative ion density (n ₋) rises marginally reaching values typically less than 2 × 10¹⁵ m⁻³ with negative ion-to-electron density ratios, α < 1. However, immediately after the transition from pulse on-to-off, n ₋ falls by about 20–30% as fast O⁻ species created at the cathode exit the system. This is followed by a rapid rise in n ₋ to values at least 2 or 3 times that in the on-time. The rate of rise of n ₋ and its maximum value both increase with decreasing duty cycle. In the off-time, the electron density falls rapidly (initial decay rates of several tens of μs), and therefore the afterglow plasma becomes highly electronegative, with α reaching 4.6 and 14.4 for 10% and 50% oxygen partial pressure, respectively. The rapid rise in n ₋ in the afterglow (in which the electron temperature falls from about 5 to 0.5 eV) is attributed to the dissociative attachment of highly excited oxygen metastables, which themselves are created in the pulse on-time. At the lowest duty of 5%, the long-term O⁻ decay times are several hundred μs. Langmuir probe characteristics show the clear signature that negative ions dominate over the electrons in the off-time. From the ion and electron saturation current ratios, α has been estimated in some chosen cases and found to agree within a factor between 2 and 10 with those obtained more directly from the photodetachment method.