Study of Electronegative Ar/O2 Discharge by Means of Langmuir Probe
- 23 June 2008
- journal article
- research article
- Published by Wiley in Contributions to Plasma Physics
- Vol. 48 (5-7), 503-508
- https://doi.org/10.1002/ctpp.200810081
Abstract
No abstract availableKeywords
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