Effect of sputtering power on surface topography of dc magnetron sputtered Ti thin films observed by AFM
- 24 December 2008
- journal article
- research article
- Published by Elsevier BV in Applied Surface Science
- Vol. 255 (8), 4673-4679
- https://doi.org/10.1016/j.apsusc.2008.12.029
Abstract
No abstract availableThis publication has 20 references indexed in Scilit:
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