The effect of bias power on some properties of titanium and titanium oxide films prepared by r.f. magnetron sputtering
- 10 September 1998
- journal article
- Published by Elsevier BV in Surface and Coatings Technology
- Vol. 107 (2-3), 172-182
- https://doi.org/10.1016/s0257-8972(98)00647-1
Abstract
No abstract availableKeywords
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