Large-Area Milky Transparent Conducting Al-Doped ZnO Films Prepared by Magnetron Sputtering

Abstract

Large-area milky transparent conducting Al-doped ZnO (AZO) films with a wedgelike textured surface have been prepared by dc magnetron sputtering. Total transmittances of 84 and 77% and haze ratios of 10 and 53% at a wavelength of 550 nm were obtained in 1.2-µm- and 3-µm-thick milky AZO films, respectively: films were prepared at a substrate temperature of 350°C and a sputter argon gas pressure of 12 Pa. A resistivity of 5.5×10^-4 Ω·cm and a sheet resistance of 1.8 Ω/sq were obtained in a large-area 3-µm-thick AZO film postannealed at 300°C for 30 min in a hydrogen atmosphere.