Textured ZnO Thin Films for Solar Cells Grown by Metalorganic Chemical Vapor Deposition
- 1 March 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (3B), L441
- https://doi.org/10.1143/jjap.30.l441
Abstract
Textured ZnO films have been grown by metalorganic chemical vapor deposition (MOCVD) using diethylzinc (DEZ) and H2O as reactant gases. It was found that the surface morphology of films was strongly dependent on the substrate temperature. For the low substrate temperature of 150°C, the surface consists of uniformly sized tetrapodlike features. These undoped films have a high transparency in a wide wavelength range from 400 nm to 1400 nm. The low-resistivity ZnO films have also been succesfully grown using a dopant gas of B2H6 diluted with H2. A sheet resistivity as low as 10 Ω/□ was obtained.Keywords
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