High Q surface acoustic wave resonators in 2–3 GHz range using ScAlN/single crystalline diamond structure
- 1 October 2012
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE) in 2012 IEEE International Ultrasonics Symposium
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
- Low propagation loss in a one-port resonator fabricated on single-crystal diamondPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2011
- Developments of elemental technologies to produce inch-size single-crystal diamond wafersDiamond and Related Materials, 2011
- Increased electromechanical coupling in w-ScxAl1-xNApplied Physics Letters, 2010
- Characterization of surface acoustic wave propagation in multi-layered structures using extended FEM/SDA softwareIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2009
- Requirements for Piezoelectric Thin Film Applications to Radio Frequency Acoustic Wave DevicesFerroelectrics, 2009
- Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive CosputteringAdvanced Materials, 2009
- Fabrication of SAW devices using SEM-based electron beam lithography and lift-off technique for lab usePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- SAW propagation characteristics and fabrication technology of piezoelectric thin film/diamond structurePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Free software products for simulation and design of surface acoustic wave and surface transverse wave devicesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Coupling-of-Modes TheoryPublished by Springer Science and Business Media LLC ,2000