Requirements for Piezoelectric Thin Film Applications to Radio Frequency Acoustic Wave Devices
- 30 June 2009
- journal article
- research article
- Published by Taylor & Francis Ltd in Ferroelectrics
- Vol. 380 (1), 73-80
- https://doi.org/10.1080/00150190902873238
Abstract
This paper discusses the requirements for piezoelectric thin film applications to radio frequency (RF) surface and bulk acoustic wave (SAW/BAW) devices. First, we survey the basic properties of RF SAW/BAW devices. We then discuss how device performances depend on the acoustic and piezoelectric properties of the piezoelectric thin films. Next, we discuss the effects of crystal grains and their boundaries within the thin films, and show how the binding strength of crystal grains affects the excitation and propagation of acoustic waves. Finally, we present basic design and characterization procedures for an SAW transversal filter employing an AlN/diamond structure.Keywords
This publication has 2 references indexed in Scilit:
- Growth and applications of piezoelectric and ferroelectric thin filmsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Surface Acoustic Wave Devices in TelecommunicationsPublished by Springer Science and Business Media LLC ,2000