SAW propagation characteristics and fabrication technology of piezoelectric thin film/diamond structure
- 13 January 2003
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 351-354 vol.1
- https://doi.org/10.1109/ultsym.1989.67007
Abstract
The authors report a theoretical analysis of the surface-acoustic wave (SAW) propagation characteristics of ZnO/diamond and AlN/diamond structures. The analysis shows about 12000 m/s and a large electromechanical coupling coefficient K/sup 2/ of 0.03 for AlN thin film. The numerical analysis for the ZnO/diamond structure shows that there exists a coupling between the Rayleigh wave and the Sezawa wave at H/ lambda =0.2 and a complex dependency of K/sup 2/ on the thickness of ZnO film. The fabrication process of synthetic-diamond thin films is described, and experimental results on the SAW propagation characteristics are presented. With the thermal filament CVD (chemical vapor deposition) method, it is possible to obtain a diamond film on a Si substrate, but the surface of it is rough, and polishing is needed to make a fine pattern on it.<>Keywords
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