Suspended metal wire array as a thermoacoustic sound source
- 19 October 2009
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 95 (16)
- https://doi.org/10.1063/1.3249770
Abstract
We demonstrate that a suspended metal wire array can be used to produce high-pressure sound waves over a wide spectrum using the thermoacoustic effect. We fabricated air-bridge arrays containing up to 2×105 wires covering an area of a few square centimeters. The supporting silicon wafer was isotropically plasma etched to release the wires thereby avoiding heat contact with the substrate. Sound pressure levels reaching 110 dB at a distance of 8 cm were demonstrated near 40 kHz in free field. The devices are also able to reproduce music and speech. They have potential for applications especially in the ultrasound range.This publication has 15 references indexed in Scilit:
- Electronic cooling of a submicron-sized metallic beamApplied Physics Letters, 2009
- Measuring nanomechanical motion with a microwave cavity interferometerNature Physics, 2008
- High-frequency metallic nanomechanical resonatorsApplied Physics Letters, 2008
- Low-frequency charge noise in suspended aluminum single-electron transistorsApplied Physics Letters, 2007
- Cooling a nanomechanical resonator with quantum back-actionNature, 2006
- Putting Mechanics into Quantum MechanicsPhysics Today, 2005
- Suspended single-electron transistors: Fabrication and measurementApplied Physics Letters, 2005
- Quantum electromechanical systemsPhysics Reports, 2004
- A superconducting antenna-coupled hot-spot microbolometerApplied Physics Letters, 2003
- The Thermophone as a Precision Source of SoundPhysical Review B, 1917