Wide-frequency-bandwidth whisker-inspired MEMS vector hydrophone encapsulated with parylene
- 28 January 2016
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 49 (7), 07LT02
- https://doi.org/10.1088/0022-3727/49/7/07lt02
Abstract
No abstract availableFunding Information
- “863”program of China (2013AA09A41)
- National Natural Science Foundation of China (61127008/F040703)
This publication has 14 references indexed in Scilit:
- Magnetostrictive Alfenol Whisker Sensor Performance and Sensitivity to Whisker ThicknessIEEE Transactions on Magnetics, 2014
- Ferrofluid Sacrificial Microfabrication of Capacitive Pressure SensorsIEEE Sensors Journal, 2014
- Polymer integration for packaging of implantable sensorsSensors and Actuators B: Chemical, 2014
- Fully Printed, Highly Sensitive Multifunctional Artificial Electronic Whisker Arrays Integrated with Strain and Temperature SensorsACS Nano, 2014
- Microelectromechanical Systems (MEMS) Based-Ultrasonic Electrostatic Actuators on a Flexible SubstrateIEEE Electron Device Letters, 2012
- Green's Functions and FormalismPublished by Springer Science and Business Media LLC ,2008
- Design, fabrication, and preliminary characterization of a novel MEMS bionic vector hydrophoneMicroelectronics Journal, 2007
- Micromachined biomimetic artificial haircell sensorsBioinspiration & Biomimetics, 2007
- Design and Characterization of Artificial Haircell Sensor for Flow Sensing With Ultrahigh Velocity and Angular SensitivityJournal of Microelectromechanical Systems, 2007
- Polyurethane Rubber All-Polymer Artificial Hair Cell SensorJournal of Microelectromechanical Systems, 2006