Design, fabrication, and preliminary characterization of a novel MEMS bionic vector hydrophone
- 1 October 2007
- journal article
- Published by Elsevier BV in Microelectronics Journal
- Vol. 38 (10-11), 1021-1026
- https://doi.org/10.1016/j.mejo.2007.09.008
Abstract
No abstract availableKeywords
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