Design and Characterization of Artificial Haircell Sensor for Flow Sensing With Ultrahigh Velocity and Angular Sensitivity
- 1 October 2007
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 16 (5), 999-1014
- https://doi.org/10.1109/jmems.2007.902436
Abstract
We report the development of an artificial hair cell (AHC) sensor with design inspired by biological hair cells. The sensor consists of a silicon cantilever beam with a high-aspect-ratio cilium attached at the distal end. Sensing is based on silicon piezoresistive strain gauge at the base of the cantilever. The cilium is made of photodefinable SU-8 epoxy and can be up to 700-mum tall. In this paper, we focus on flow-sensing applications. We have characterized the performance of the AHC sensor both in water and in air. For underwater applications, we have characterized the sensor under two flow conditions: steady-state laminar flow (dc flow) and oscillatory flow (ac flow). The detection limit of the sensor under ac flow in water is experimentally established to be below 1 mm/s. A best case angular resolution of 2.16deg is also achieved for the sensor's yaw response in air.Keywords
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