Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing
- 4 September 2002
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 12 (6), 780-785
- https://doi.org/10.1088/0960-1317/12/6/309
Abstract
No abstract availableKeywords
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