A graphical representation of the piezoresistance coefficients in silicon
- 1 January 1982
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 29 (1), 64-70
- https://doi.org/10.1109/t-ed.1982.20659
Abstract
The longitudinal and transverse piezoresistance coefficients, Π(300 K), at room temperature are plotted as a function of the crystal directions for orientations in theKeywords
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