Buried piezoresistive sensors by means of MeV ion implantation
- 31 May 1994
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 43 (1-3), 249-253
- https://doi.org/10.1016/0924-4247(93)00673-r
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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