A 32-site neural recording probe fabricated by DRIE of SOI substrates
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Open Access
- 14 June 2002
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 12 (4), 414-419
- https://doi.org/10.1088/0960-1317/12/4/312
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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