Thin-film multielectrode arrays for a cochlear prosthesis
- 1 January 1982
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 29 (1), 136-144
- https://doi.org/10.1109/t-ed.1982.20671
Abstract
The design and fabrication of flexible thin-film microelectrode arrays for use in a cochlear prosthesis are described. The electrode array is designed to be inserted through the round window of the cochlea into the spiral scala tympani chamber of the cochlea. A lifetime of decades under stimulation is sought. The electrode array is comprised of photolithographically defined platinum-on-tantalum conductors sandwiched between polyimide layers. A liquid polyimide is used, which polymerizes in two stages. After the first stage of curing, the polyimide is susceptible to photolithographic etching, allowing patterned access holes to be cut into the top layer of the insulating sandwich. After the second cure, the polymer becomes inert biocompatible Kapton. The processing techniques and the electrode test results are presented.Keywords
This publication has 10 references indexed in Scilit:
- An Eight Channel Scala Tympani Electrode for Auditory ProsthesesIEEE Transactions on Biomedical Engineering, 1980
- A tantalum-on-sapphire microelectrode arrayIEEE Transactions on Electron Devices, 1979
- High performance, high density MOS process using polyimide interlevel insulationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1979
- Electrical Stimulation with Pt Electrodes: Trace Analysis for Dissolved Platinum and Other Dissolved Electrochemical ProductsBrain, Behavior and Evolution, 1977
- Implantation of multiple intracochlear electrodes for rehabilitation of total deafness: Preliminary reportThe Laryngoscope, 1976
- A multiple-electrode array for a cochlear implantThe Journal of Laryngology & Otology, 1976
- Electrical stimulation of the nervous system: The principle of safe charge injection with noble metal electrodesBioelectrochemistry and Bioenergetics, 1975
- A CMOS implantable multielectrode auditory stimulator for the deafIEEE Journal of Solid-State Circuits, 1975
- A prototype flexible microelectrode array for implant-prosthesis applicationsMedical & Biological Engineering & Computing, 1974
- Theory and design of capacitor electrodes for chronic stimulationMedical & Biological Engineering & Computing, 1974