A New Route to Zero-Barrier Metal Source/Drain MOSFETs
- 30 March 2004
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Nanotechnology
- Vol. 3 (1), 98-104
- https://doi.org/10.1109/tnano.2003.820774
Abstract
A new method for dramatically lowering the Schottky barrier resistance at a metal/Si interface by interposing an ultrathin insulator is demonstrated for the first time, with thermionic barriers less than those reported to date with silicides. Results with Er and near-monolayer thermal SiN/sub x/ at the interface are consistent with simulations of effective metal Fermi level separations from the silicon conduction band of 0.15 V for n-type Si and 45 mV for p-type Si. Simulations of advanced metal source/drain (S/D) ultrathin-body CMOS devices in comparison with competitive doped S/D devices show a significant performance advantage with a barrier to the conduction band of up to 0.1 V.Keywords
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