Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices
- 31 March 2007
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 84 (3), 387-412
- https://doi.org/10.1016/j.mee.2006.10.059
Abstract
No abstract availableKeywords
This publication has 71 references indexed in Scilit:
- Adhesion and Friction Studies of Silicon and Hydrophobic and Low Friction Films and Investigation of Scale EffectsJournal of Tribology, 2004
- Adhesion and friction studies of microelectromechanical systems/nanoelectromechanical systems materials using a novel microtriboapparatusJournal of Vacuum Science & Technology A, 2003
- Micro Electro Mechanical Systems (MEMS) Micro-Switches for Use in DC, RF, and Optical ApplicationsJapanese Journal of Applied Physics, 2002
- The DMDTM Projection Display Chip: A MEMS-Based TechnologyMRS Bulletin, 2001
- Ultrahigh density, high-data-rate NEMS-based AFM data storage systemMicroelectronic Engineering, 1999
- Characterization of polycrystalline silicon carbide films grown by atmospheric pressure chemical vapor deposition on polycrystalline siliconJournal of Materials Research, 1998
- Nanoindentation and picoindentation measurements using a capacitive transducer system in atomic force microscopyPhilosophical Magazine A, 1996
- Tribology of Ion Bombarded Silicon for Micromechanical ApplicationsJournal of Tribology, 1993
- Integrated fabrication of polysilicon mechanismsIEEE Transactions on Electron Devices, 1988
- Wettability of porous surfacesTransactions of the Faraday Society, 1944