Simulation methods for micro-electro-mechanical structures (MEMS) with application to a microtweezer
Open Access
- 3 September 1995
- journal article
- Published by Elsevier BV in Computers & Structures
- Vol. 56 (5), 769-783
- https://doi.org/10.1016/0045-7949(95)00007-4
Abstract
No abstract availableKeywords
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