Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides
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- 26 March 2007
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Lightwave Technology
- Vol. 25 (1), 151-156
- https://doi.org/10.1109/jlt.2006.888164
Abstract
We present high-efficiency grating couplers for coupling between a single-mode fiber and nanophotonic waveguides, fabricated both in silicon-on-insulator (SOI) and InP membranes using BenzoCycloButene wafer bonding. The coupling efficiency is substantially increased by adding a gold bottom mirror to the structures. The measured coupling efficiency to fiber is 69% for SOI grating couplers and 56% for bonded InP membrane grating couplersKeywords
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