Effects of grating heights on highly efficient unibond SOI waveguide grating couplers
- 1 January 2000
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 12 (1), 59-61
- https://doi.org/10.1109/68.817493
Abstract
We report the first successful experimental evaluation of the effect of grating height upon the output efficiency of grating couplers as predicted using perturbation theory. In addition, we have also produced a grating with an output efficiency of 70%, which is the highest efficiency yet reported for a silicon-on-insulator waveguide grating coupler.Keywords
This publication has 11 references indexed in Scilit:
- Grating couplers using silicon-on-insulatorPublished by SPIE-Intl Soc Optical Eng ,1999
- 0.15 dB/cm loss in Unibond SOI waveguidesElectronics Letters, 1999
- The single-mode condition for semiconductor rib waveguides with large cross sectionJournal of Lightwave Technology, 1998
- Silicon on insulator Mach–Zehnder waveguide interferometers operating at 1.3 μmApplied Physics Letters, 1995
- Silicon on insulator material technologyElectronics Letters, 1995
- Silicon-on-insulator optical rib waveguides: loss, mode characteristics, bends and y-junctionsIEE Proceedings - Optoelectronics, 1994
- Low-loss planar optical waveguides fabricated in SIMOX materialIEEE Photonics Technology Letters, 1992
- Silicon Mach–Zehnder waveguide interferometers based on the plasma dispersion effectApplied Physics Letters, 1991
- Analysis and design of grating couplersApplied Physics A, 1977
- High-efficiency blazed grating couplersApplied Physics Letters, 1976