High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform
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- 10 August 2010
- journal article
- Published by Optica Publishing Group in Optics Express
- Vol. 18 (17), 18278-18283
- https://doi.org/10.1364/oe.18.018278
Abstract
A new generation of Silicon-on-Insulator fiber-to-chip grating couplers which use a silicon overlay to enhance the directionality and thereby the coupling efficiency is presented. Devices are realized on a 200mm wafer in a CMOS pilot line. The fabricated fiber couplers show a coupling efficiency of −1.6dB and a 3dB bandwidth of 80nm.Keywords
This publication has 11 references indexed in Scilit:
- High efficiency diffractive grating coupler based on transferred silicon nanomembrane overlay on photonic waveguideJournal of Physics D: Applied Physics, 2009
- Fabrication-Tolerant Waveguide Chirped Grating Coupler for Coupling to a Perfectly Vertical Optical FiberIEEE Photonics Technology Letters, 2008
- High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuitApplied Physics Letters, 2008
- Focused-Ion-Beam Fabrication of Slanted Grating Couplers in Silicon-on-Insulator WaveguidesIEEE Photonics Technology Letters, 2007
- High efficiency grating coupler between silicon-on-insulator waveguides and perfectly vertical optical fibersOptics Letters, 2007
- Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic WaveguidesJournal of Lightwave Technology, 2007
- Light injection in SOI microwaveguides using high-efficiency grating couplersJournal of Lightwave Technology, 2006
- High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlayOptics Express, 2006
- Compact efficient broadband grating coupler for silicon-on-insulator waveguidesOptics Letters, 2004
- An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibersIEEE Journal of Quantum Electronics, 2002