Focused-Ion-Beam Fabrication of Slanted Grating Couplers in Silicon-on-Insulator Waveguides
- 7 May 2007
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 19 (11), 816-818
- https://doi.org/10.1109/lpt.2007.897293
Abstract
We have designed and fabricated an efficient grating coupler for coupling light between optical fibers and silicon-on-insulator waveguides. The coupler consists of 88-nm-wide slits, etched at an angle of 58deg to the surface normal. They are defined by direct etching with a focused ion beam, using iodine gas and an alumina hard mask. The measured efficiency is 46%Keywords
This publication has 8 references indexed in Scilit:
- Focused-ion-beam fabricated vertical fiber couplers on silicon-on-insulator waveguidesApplied Physics Letters, 2006
- Fabrication of Two-Dimensional Photonic Crystal Slab Point-Defect Cavity Employing Local Three-Dimensional StructuresJapanese Journal of Applied Physics, 2006
- High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlayOptics Express, 2006
- Embedded slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguidesIEEE Photonics Technology Letters, 2005
- Diffraction grating couplers milled in Si3N4 rib waveguides with a focused ion beamOptics Express, 2005
- Compact efficient broadband grating coupler for silicon-on-insulator waveguidesOptics Letters, 2004
- FIB‐induced damage in siliconJournal of Microscopy, 2004
- Recent developments in micromilling using focused ion beam technologyJournal of Micromechanics and Microengineering, 2004