Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
- 16 April 2010
- journal article
- Published by ASME International in Journal of Dynamic Systems, Measurement, and Control
- Vol. 132 (3), 034001
- https://doi.org/10.1115/1.4001333
Abstract
This review provides a summary of work on the resonant nonlinear dynamics of micro- and nanoelectromechanical systems. This research area, which has been active for approximately a decade, involves the study of nonlinear behaviors arising in small scale, vibratory, mechanical devices that are typically integrated with electronics for use in signal processing, actuation, and sensing applications. The inherent nature of these devices, which includes low damping, desired resonant operation, and the presence of nonlinear potential fields, sets an ideal stage for the appearance of nonlinear behavior. While nonlinearities are typically avoided in device design, they have the potential to allow designers to beneficially leverage nonlinear behavior in certain applications. This paper provides an overview of the fundamental research on nonlinear behaviors arising in micro-/nanoresonators, including direct and parametric resonances in individual resonators and coupled resonator arrays, and also describes the active exploitation of nonlinear dynamics in the development of resonant mass sensors, inertial sensors, and electromechanical signal processing systems. This paper closes with some brief remarks about important ongoing developments in the field.Keywords
This publication has 103 references indexed in Scilit:
- Vibrations of parallel arrays of electrostatically actuated microplatesJournal of Sound and Vibration, 2008
- Bit storage and bit flip operations in an electromechanical oscillatorNature Nanotechnology, 2008
- Nonlinear model and system identification of a capacitive dual-backplate MEMS microphoneJournal of Sound and Vibration, 2008
- Non-linear vibrations and frequency response analysis of piezoelectrically driven microcantileversInternational Journal of Non-Linear Mechanics, 2007
- Signal amplification in a nanomechanical Duffing resonator via stochastic resonanceApplied Physics Letters, 2007
- Generalized parametric resonance in electrostatically actuated microelectromechanical oscillatorsJournal of Sound and Vibration, 2006
- Temperature dependence of a nanomechanical switchApplied Physics Letters, 2005
- Parametric excitation of circular micromachined polycrystalline silicon disksApplied Physics Letters, 2004
- Shell-type micromechanical actuator and resonatorApplied Physics Letters, 2003
- Secondary resonances of electrically actuated resonant microsensorsJournal of Micromechanics and Microengineering, 2003