Generalized parametric resonance in electrostatically actuated microelectromechanical oscillators
- 10 October 2006
- journal article
- Published by Elsevier BV in Journal of Sound and Vibration
- Vol. 296 (4-5), 797-829
- https://doi.org/10.1016/j.jsv.2006.03.009
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- Tunable Microelectromechanical Filters that Exploit Parametric ResonanceJournal of Vibration and Acoustics, 2005
- Air damping in laterally oscillating microresonators: A numerical and experimental studyJournal of Microelectromechanical Systems, 2003
- Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensorSensors and Actuators A: Physical, 2002
- Dynamic analysis of piecewise linear oscillators with time periodic coefficientsInternational Journal of Non-Linear Mechanics, 2000
- NON-LINEAR DYNAMICS OF GEAR-PAIR SYSTEMS WITH PERIODIC STIFFNESS AND BACKLASHJournal of Sound and Vibration, 2000
- Microelectromechanical filters for signal processingJournal of Microelectromechanical Systems, 1998
- Electrostatic control of mechanical quality factors for surface-micromachined lateral resonatorsJournal of Micromechanics and Microengineering, 1996
- Stability Analysis Of The Non-Linear Mathieu EquationJournal of Sound and Vibration, 1993
- Laterally Driven Polysilicon Resonant MicrostructuresSensors and Actuators, 1989
- Suppression of Period Doubling in Symmetric SystemsPhysical Review Letters, 1984