Synergistic Effect of Glycine and BTA on Step Height Reduction Efficiency after Copper CMP in Weakly Alkaline Slurry
- 2 December 2016
- journal article
- Published by The Electrochemical Society in ECS Journal of Solid State Science and Technology
- Vol. 6 (1), P1-P6
- https://doi.org/10.1149/2.0291612jss
Abstract
No abstract availableFunding Information
- major National Science and Technology Special Projects (2014ZX02301003-007)
- Natural Science Foundation for the Youth of Hebei Province (F2015202267)
- Natural Science Key Project of Hebei Province (ZD2016123)
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