A simultaneous vertical and horizontal self-patterning method for deep three-dimensional microstructures
- 26 June 2007
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 17 (7), S68-S76
- https://doi.org/10.1088/0960-1317/17/7/s02
Abstract
No abstract availableKeywords
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