High resolution 3D NanoImprint technology: Template fabrication, application in Fabry–Pérot-filter-array-based optical nanospectrometers
- 4 May 2013
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 110, 44-51
- https://doi.org/10.1016/j.mee.2013.04.038
Abstract
No abstract availableKeywords
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