MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range
- 20 June 2005
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 15 (7), S145-S152
- https://doi.org/10.1088/0960-1317/15/7/021
Abstract
No abstract availableThis publication has 35 references indexed in Scilit:
- Biological microsystem for measuring uric acid in biological fluidsSensors and Actuators A: Physical, 2004
- State-of-the-Art in Integrated Optical MicrospectrometersIEEE Transactions on Instrumentation and Measurement, 2004
- A modular fabrication concept for microoptical systemsJournal of Lightwave Technology, 2003
- Silicon thin-film UV filter for NADH fluorescence analysisSensors and Actuators A: Physical, 2002
- Silicon Photodetectors with a Selective Spectral ResponseSensors Update, 2001
- Nanoparticle Characterization in Nanoliter Volumes by Grating Light Reflection SpectroscopyAnalytical Chemistry, 2000
- Miniaturized time-scanning Fourier transform spectrometer based on silicon technologyOptics Letters, 1999
- Miniature spectrometers for biochemical analysisSensors and Actuators A: Physical, 1997
- Silicon micromachined infrared sensor with tunable wavelength selectivity for application in infrared spectroscopySensors and Actuators A: Physical, 1995
- Narrow-band tunable wavelength-selective filters of Fabry-Perot interferometers with a liquid crystal intracavityIEEE Photonics Technology Letters, 1991