Implementation of an imprint damascene process for interconnect fabrication
- 1 May 2006
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 24 (3), 1283-1291
- https://doi.org/10.1116/1.2197508
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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