Transparent ZnO-TFT Arrays Fabricated by Atomic Layer Deposition
- 1 January 2008
- journal article
- Published by The Electrochemical Society in Electrochemical and Solid-State Letters
- Vol. 11 (1), H10-H14
- https://doi.org/10.1149/1.2801017
Abstract
Transparent ZnO thin film transistor (TFT) array of (106 dpi) was fabricated on glass substrate. The of the TFT with inverted coplanar structure is about 0.8 V and the mobility is . The active layer (ZnO), gate insulator , and source–drain electrode (ZnO:Al) were deposited by atomic layer deposition. We also compared the performance of TFTs fabricated by lift-off and wet-etching process as the patterning processes of ZnO layer. The carrier density of the ZnO layer was carefully adjusted to reduce off-current of TFT. Good contact with small contact resistance was formed between the active layer and the source–drain electrode.Keywords
This publication has 19 references indexed in Scilit:
- Solution-Processed Zinc Oxide Field-Effect Transistors Based on Self-Assembly of Colloidal NanorodsNano Letters, 2005
- Low-voltage ZnO thin-film transistors with high-KBi1.5Zn1.0Nb1.5O7 gate insulator for transparent and flexible electronicsApplied Physics Letters, 2005
- Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductorsNature, 2004
- Wide-bandgap high-mobility ZnO thin-film transistors produced at room temperatureApplied Physics Letters, 2004
- Enhancement-mode thin-film field-effect transistor using phosphorus-doped (Zn,Mg)O channelApplied Physics Letters, 2004
- Transparent ElectronicsScience, 2003
- Transparent ZnO thin-film transistor fabricated by rf magnetron sputteringApplied Physics Letters, 2003
- ZnO-based transparent thin-film transistorsApplied Physics Letters, 2003
- Transparent thin film transistors using ZnO as an active channel layer and their electrical propertiesJournal of Applied Physics, 2003
- Thin Film Transistor of ZnO Fabricated by Chemical Solution DepositionJapanese Journal of Applied Physics, 2001