Integrated high frequency aluminum nitride optomechanical resonators
- 23 April 2012
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 100 (17), 171111
- https://doi.org/10.1063/1.4707898
Abstract
Aluminum nitride (AlN) has been widely used in microeletromechanical resonators for its excellent electromechanical properties. Here, we demonstrate the use of AlN as an optomechanical material that simultaneously offers low optical and mechanical loss. Integrated AlN microring resonators in the shape of suspended rings exhibit high optical quality factor (Q) with loaded Q up to 125 000. Optomechanical transduction of the Brownian motion of a GHz contour mode yields a displacement sensitivity of 6.2 × 10−18 m/Hz1/2 in ambient air.Keywords
Other Versions
This publication has 13 references indexed in Scilit:
- High-Q aluminum nitride photonic crystal nanobeam cavitiesApplied Physics Letters, 2012
- A monolithic radiation-pressure driven, low phase noise silicon nitride opto-mechanical oscillator.Optics Express, 2011
- GHz optomechanical resonators with high mechanical Q factor in airOptics Express, 2011
- Temperature-compensated aluminum nitride lamb wave resonatorsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2010
- Optomechanical crystalsNature, 2009
- Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin filmsApplied Physics Letters, 2009
- Broadband all-photonic transduction of nanocantileversNature Nanotechnology, 2009
- Preparation of aluminum nitride thin films by reactive sputtering and their applications to GHz-band surface acoustic wave devicesApplied Physics Letters, 1994
- Electro-optical effect in aluminum nitride waveguidesJournal of Applied Physics, 1992
- Radial Vibrations in Short, Hollow Cylinders of Barium TitanateThe Journal of the Acoustical Society of America, 1956