High-Q aluminum nitride photonic crystal nanobeam cavities
- 27 February 2012
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 100 (9), 091105
- https://doi.org/10.1063/1.3690888
Abstract
We demonstrate high optical quality factors in aluminum nitride (AlN) photonic crystal nanobeam cavities. Suspended AlN photonic crystal nanobeams are fabricated in sputter-deposited AlN-on-insulator substrates using a self-protecting release process. Employing one-dimensional photonic crystal cavities coupled to integrated optical circuits, we measure quality factors up to 146 000. By varying the waveguide-cavity coupling gap, extinction ratios in excess of 15 dB are obtained. Our results open the door for integrated photonic bandgap structures made from a low loss, wide-transparency, nonlinear optical material system.Keywords
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