Temperature-compensated aluminum nitride lamb wave resonators
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- 4 March 2010
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
- Vol. 57 (3), 524-532
- https://doi.org/10.1109/tuffc.2010.1443
Abstract
In this paper, the temperature compensation of AlN Lamb wave resonators using edge-type reflectors is theoretically studied and experimentally demonstrated. By adding a compensating layer of SiO2 with an appropriate thickness, a Lamb wave resonator based on a stack of AlN and SiO2 layers can achieve a zero first-order temperature coefficient of frequency (TCF). Using a composite membrane consisting of 1 ¿m AlN and 0.83 ¿m SiO2, a Lamb wave resonator operating at 711 MHz exhibits a first-order TCF of -0.31 ppm/°C and a second-order TCF of -22.3 ppb/°C2 at room temperature. The temperature-dependent fractional frequency variation is less than 250 ppm over a wide temperature range from -55°C to 125°C. This temperature-compensated AlN Lamb wave resonator is promising for future applications including thermally stable oscillators, filters, and sensors.Keywords
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