Effects of the ultrasonic flexural vibration on the interaction between the abrasive particles; pad and sapphire substrate during chemical mechanical polishing (CMP)
- 15 January 2011
- journal article
- Published by Elsevier BV in Applied Surface Science
- Vol. 257 (7), 2905-2911
- https://doi.org/10.1016/j.apsusc.2010.10.088
Abstract
No abstract availableKeywords
Funding Information
- National Natural Science Funds (50825501)
- National Natural Science Foundation of China (50775122)
- International Scientific Cooperated Program of Technological Ministry (2006DFA73350)
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