Ultra low-k property of hydrogenated carbon nitride: Chemical evaluation
- 1 February 2012
- journal article
- Published by Elsevier BV in Chemical Physics Letters
- Vol. 524, 62-67
- https://doi.org/10.1016/j.cplett.2011.12.054
Abstract
No abstract availableThis publication has 25 references indexed in Scilit:
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