Sol-Gel-Derived Mesoporous Silica Films with Low Dielectric Constants
- 1 November 2000
- journal article
- research article
- Published by Wiley in Advanced Materials
- Vol. 12 (22), 1695-1698
- https://doi.org/10.1002/1521-4095(200011)12:22<1695::aid-adma1695>3.0.co;2-v