X-ray absorption spectroscopy study of Yb2O3 and Lu2O3 thin films deposited on Si(100) by atomic layer deposition
- 14 February 2006
- journal article
- Published by Elsevier BV in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 246 (1), 90-95
- https://doi.org/10.1016/j.nimb.2005.12.020
Abstract
No abstract availableKeywords
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