Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials
- 7 May 2004
- journal article
- research article
- Published by Wiley in physica status solidi (a)
- Vol. 201 (7), 1443-1452
- https://doi.org/10.1002/pssa.200406798
Abstract
No abstract availableKeywords
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