Structural and electrical characterisation of titanium and nickel silicide contacts on silicon carbide
- 31 January 2002
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 60 (1-2), 269-282
- https://doi.org/10.1016/s0167-9317(01)00604-9
Abstract
No abstract availableKeywords
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