A vacuum packaged surface micromachined resonant accelerometer
Top Cited Papers
- 16 December 2002
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 11 (6), 784-793
- https://doi.org/10.1109/jmems.2002.805207
Abstract
This paper describes the operation of a vacuum packaged resonant accelerometer subjected to static and dynamic acceleration testing. The device response is in broad agreement with a new analytical model of its behavior under an applied time-varying acceleration. Measurements include tests of the scale factor of the sensor and the dependence of the output sideband power and the noise floor of the double-ended tuning fork oscillators as a function of the applied acceleration frequency. The resolution of resonant accelerometers is shown to degrade 20 dB/decade beyond a certain characteristic acceleration corner frequency. A prototype device was fabricated at Sandia National Laboratories and exhibits a noise floor of 40 /spl mu/g//spl radic/(Hz) for an input acceleration frequency of 300 Hz.Keywords
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