Low-cost low-power uncooled a-Si-based micro infrared camera

Abstract
An amorphous silicon (a-Si) microbolometer-based uncooled infrared camera technology, offering a low- cost, low-power solution to infrared surveillance for both civilian and military application is presented. A- Si exhibits a temperature dependent resistance with a 3000K temperature coefficient of resistance (TCR) of 2.7 percent/K. The uncooled a-Si microbolometer detector structure employs a low thermal mass a-Si membrane structure with high thermal isolation legs monolithically integrated on a CMOS readout integrated circuit (ROIC) chip. A refractive resonant cavity design results in approximately 90 percent infrared absorptance over the 8-13 um spectral band. A-Si also exhibits a UV/visible photoconductive response for multispectral applications. The ROIC involves an integrating amplifier per pixel and a column multiplexed output. A 15 x 31 micro infrared camera (MIRC) has been developed, which exhibits f/l noise equivalent temperature difference, thereby significantly reducing the power requirements. The 15 x 31 camera demonstrated exhibits a 35 mm camera form factor employing a low cost f/l singlet optic and LED display, as well as low cost vacuum packaging. A larger 120 x 160 version of the MIRC is also in development and will be discussed.